This is a huge detail that further complicates the picture, ASML's lithography technology heavily benefitted from United States DOE research:
> In 1997, ASML began studying a shift to using extreme ultraviolet. Two years later, it joined a consortium, which included Intel and two other U.S. chipmakers, in order to exploit fundamental research conducted by the US Department of Energy. Because the Cooperative Research and Development Agreement (CRADA) it operates under is funded by the US government, licensing must be approved by Congress.
> heavily benefitted from United States DOE research
Not just heavily benefitted. The entire wafer-making technology is the result of US government funding and research. There's a reason why Cymer continues to operate independently in San Diego instead of by ASML in Europe. That was mandated by the acquisition agreement. The R&D and manufacture of the EUV light sources had to remain in California. ASML in the Netherlands is just the final assembler of the machines.