> heavily benefitted from United States DOE research

Not just heavily benefitted. The entire wafer-making technology is the result of US government funding and research. There's a reason why Cymer continues to operate independently in San Diego instead of by ASML in Europe. That was mandated by the acquisition agreement. The R&D and manufacture of the EUV light sources had to remain in California. ASML in the Netherlands is just the final assembler of the machines.