Also Japan has a monopoly on essential EUV materials like photoresists and mask blanks and pellicles. Japan is also the only country in the world that can produce a number of highly specialized ancillary machinery like the actinic light systems used to inspect EUV photomasks. ASML also acquired its e-beam inspection tech from a Taiwanese company. There's also no way ASML could run anything at production if it wasn't for TSMC and Samsung.

Not to mention the critical role of the US in its development. The core EUV light source was invented in San Diego!