Complexity doesn't necessarily mean it's suboptimal. Lithography and nanofab are usually doing a whole range of disparate and wildly exotic processes with extreme vacuum, plasmas, electron guns; any number of crazy and dangerous process gases like H2, HF, or silane; and occasionally raw materials like iridium and rhodium. And that's all without the actual lithography. When your margin for error is measured in single atoms and your number of features per die outnumber the planet's population 2:1, physical laws start to stand in the way of simplification.

The one 'machine' encompasses more disciplines than most universities offer. It's really a whole bleeding edge factory compressed into a room.