I worked on part of it in 2006-8. I noticed that our office waste wasn't being shredded, and asked my boss why not...

"With all the problems we have getting this to work? We ought to ship our drawings to our competitors to slow them down!"

Very tongue-in-cheek, but... yeah. The entire machine underwent a massive overhaul when it was discovered that bare, unoxidized titanium in the presence of elemental hydrogen would absorb so much it became brittle. Who knew? Maybe some few chemists, but none worked in ASML design, as it happened.